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Interfacial structure of ICB epitaxially deposited Al(110) bicrystal films on Si(100) substrates

โœ Scribed by Isao Yamada


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
419 KB
Volume
41-42
Category
Article
ISSN
0169-4332

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Al-doped ZnO (ZnO:Al) thin films were deposited on Si substrates using the radio-frequency reactive magnetron sputtering technique. Effect of Al contents and annealing treatments on the structural and photoluminescence (PL) properties of ZnO films was investigated. The results showed that crystallin