✦ LIBER ✦
817. Epitaxial growth of SiC films on Si substrate and its crystal structure: H Nakashima et al, Japan J Appl Phys, 5, 1966, 874–878
- Publisher
- Elsevier Science
- Year
- 1967
- Tongue
- English
- Weight
- 128 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0042-207X
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