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Optical and electrical characterization of hafnium oxide deposited by liquid injection atomic layer deposition

✍ Scribed by P. Taechakumput; S. Taylor; O. Buiu; R.J. Potter; P.R. Chalker; A.C. Jones

Book ID: 108210695
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 428 KB
Volume: 47
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2007.01.049

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