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Study of thin hafnium oxides deposited by atomic layer deposition

✍ Scribed by J.-J. Ganem; I. Trimaille; I.C. Vickridge; D. Blin; F. Martin


Book ID
113823000
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
365 KB
Volume
219-220
Category
Article
ISSN
0168-583X

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