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On the tunneling component of charge pumping current in ultrathin gate oxide MOSFETs

✍ Scribed by Masson, P.; Autran, J.-L.; Brini, J.


Book ID
121361210
Publisher
IEEE
Year
1999
Tongue
English
Weight
62 KB
Volume
20
Category
Article
ISSN
0741-3106

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Influence of defects on elastic gate tun
✍ M StΓ€dele; B Fischer; B.R Tuttle; K Hess πŸ“‚ Article πŸ“… 2000 πŸ› Elsevier Science 🌐 English βš– 179 KB

We study theoretically the influence of neutral oxygen vacancies on the magnitude of elastic tunneling currents through the ultrathin (1.3 nm) gate oxide of a prototypical metaloxide field-effect transistor with a channel length of 50 nm. For the calculation of the gate currents, we have used transm