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On the relationship between the peak target current and the morphology of chromium nitride thin films deposited by reactive high power pulsed magnetron sputtering

✍ Scribed by Alami, J; Sarakinos, K; Uslu, F; Wuttig, M

Book ID: 120810723
Publisher: Institute of Physics
Year: 2008
Tongue: English
Weight: 1022 KB
Volume: 42
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/42/1/015304

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