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Observation of Si out-diffusion related defects in SiC growth on Si(001)

✍ Scribed by M. Diani; A. Mesli; L. Kubler; A. Claverie; J.L. Balladore; D. Aubel; S. Peyre; T. Heiser; J.L. Bischoff


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
428 KB
Volume
29
Category
Article
ISSN
0921-5107

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