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X-ray topographic observation of subsurface line defects in GaAs on Si substrate

✍ Scribed by T. Yamamoto; Y. Shiba; K. Fujita

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 788 KB
Volume: 103
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(90)90211-3

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