X-ray photoelectron diffraction observation of β-SiC(001) obtained by electron cyclotron resonance plasma assisted growth on Si(001)

✍ Scribed by M. Diani; J.L. Bischoff; L. Kubler; D. Bolmont

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 617 KB
• Volume: 68
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(93)90239-8