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Numerical study of SiC CVD in a vertical cold-wall reactor

✍ Scribed by A.N. Vorob'ev; S.Yu. Karpov; M.V. Bogdanov; A.E. Komissarov; O.V. Bord; A.I. Zhmakin; Yu.N. Makarov

No coin nor oath required. For personal study only.

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