A unified treatment of thickness homogeneity problems in CVD (II). Cold-wall reactors

✍ Scribed by Prof. Dr. H. Arnold

• Publisher: John Wiley and Sons
• Year: 1980
• Tongue: English
• Weight: 377 KB
• Volume: 15
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.19800150510