Transport phenomena analysis for boron CVD in a horizontal cold-wall reactor

✍ Scribed by Chul Soon Park; John S. Chun

• Book ID: 107789921
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 469 KB
• Volume: 80
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(87)90065-0