Silicon Carbide Epitaxy in a Vertical CVD Reactor: Experimental Results and Numerical Process Simulation

✍ Scribed by R. Rupp; Yu.N. Makarov; H. Behner; A. Wiedenhofer

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 664 KB
• Volume: 202
• Category: Article
• ISSN: 0370-1972
• DOI: 10.1002/1521-3951(199707)202:1<281::aid-pssb281>3.0.co;2-y