✦ LIBER ✦

Numerical investigation of ion-energy-distribution functions in single and dual frequency capacitively coupled plasma reactors

✍ Scribed by Georgieva, V.; Bogaerts, A.; Gijbels, R.

Book ID: 119973093
Publisher: The American Physical Society
Year: 2004
Tongue: English
Weight: 201 KB
Volume: 69
Category: Article
ISSN: 1063-651X
DOI: 10.1103/PhysRevE.69.026406

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Experimental investigation of ion energy

Experimental investigation of ion energy distributions in a dual frequency capacitively coupled Ar/CF[sub 4] plasma

✍ Li, Zhi-Cheng; Chang, Da-Lei; Li, Xiao-Song; Bi, Zhen-Hua; Lu, Wen-Qi; Xu, Yong; 📂 Article 📅 2010 🏛 American Institute of Physics 🌐 English ⚖ 627 KB

Ion energy distribution function in dual

Ion energy distribution function in dual-frequency rf capacitively coupled discharges: Analytical model

✍ Olevanov, M.; Proshina, O.; Rakhimova, T.; Voloshin, D. 📂 Article 📅 2008 🏛 The American Physical Society 🌐 English ⚖ 723 KB

Numerical study of Ar/CF[sub 4]/N[sub 2]

Numerical study of Ar/CF[sub 4]/N[sub 2] discharges in single- and dual-frequency capacitively coupled plasma reactors

✍ Georgieva, V.; Bogaerts, A.; Gijbels, R. 📂 Article 📅 2003 🏛 American Institute of Physics 🌐 English ⚖ 734 KB

Comparison of measurements and particle-

Comparison of measurements and particle-in-cell simulations of ion energy distribution functions in a capacitively coupled radio-frequency discharge

✍ O’Connell, D.; Zorat, R.; Ellingboe, A. R.; Turner, M. M. 📂 Article 📅 2007 🏛 American Institute of Physics 🌐 English ⚖ 700 KB

Influence of dual-frequency source power

Influence of dual-frequency source powers on ion density and electron temperature in capacitively-coupled argon plasma

✍ Xiang-Zhan Jiang; Yong-Xin Liu; Wen-Qi Lu; Zhen-Hua Bi; Fei Gao; You-Nian Wang 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 366 KB

Experimental and Theoretical Study of Io

Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges

✍ Rakhimova, Tatyana V.; Braginsky, Oleg V.; Ivanov, Vladimir V.; Kovalev, Alexand 📂 Article 📅 2007 🏛 IEEE 🌐 English ⚖ 473 KB