Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges

✍ Scribed by Rakhimova, Tatyana V.; Braginsky, Oleg V.; Ivanov, Vladimir V.; Kovalev, Alexander S.; Lopaev, Dmitry V.; Mankelevich, Yuri A.; Olevanov, Michael A.; Proshina, Olga V.; Rakhimov, Alexander T.; Vasilieva, Anna N.; Voloshin, Dmitry G.

• Book ID: 118194542
• Publisher: IEEE
• Year: 2007
• Tongue: English
• Weight: 473 KB
• Volume: 35
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/tps.2007.905201