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Ion energy distribution function in dual-frequency rf capacitively coupled discharges: Analytical model

✍ Scribed by Olevanov, M.; Proshina, O.; Rakhimova, T.; Voloshin, D.

Book ID: 119973098
Publisher: The American Physical Society
Year: 2008
Tongue: English
Weight: 723 KB
Volume: 78
Category: Article
ISSN: 1063-651X
DOI: 10.1103/PhysRevE.78.026404

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