✦ LIBER ✦

Experimental investigation of ion energy distributions in a dual frequency capacitively coupled Ar/CF[sub 4] plasma

✍ Scribed by Li, Zhi-Cheng; Chang, Da-Lei; Li, Xiao-Song; Bi, Zhen-Hua; Lu, Wen-Qi; Xu, Yong; Zhu, Ai-Min; Wang, You-Nian

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Numerical study of Ar/CF[sub 4]/N[sub 2]

✍ Georgieva, V.; Bogaerts, A.; Gijbels, R. 📂 Article 📅 2003 🏛 American Institute of Physics 🌐 English ⚖ 734 KB

Numerical investigation of ion-energy-di

✍ Georgieva, V.; Bogaerts, A.; Gijbels, R. 📂 Article 📅 2004 🏛 The American Physical Society 🌐 English ⚖ 201 KB

Particle-in-cell/Monte Carlo simulation

✍ Georgieva, V.; Bogaerts, A.; Gijbels, R. 📂 Article 📅 2003 🏛 American Institute of Physics 🌐 English ⚖ 325 KB

Measurements of the electron energy dist

✍ Bowden, M. D.; Tabata, R.; Suanpoot, P.; Uchino, K.; Muraoka, K.; Noguchi, M. 📂 Article 📅 2001 🏛 American Institute of Physics 🌐 English ⚖ 299 KB

Plasma characteristics of an Ar/CF4/N2 d

✍ Georgieva, V; Bogaerts, A 📂 Article 📅 2006 🏛 Institute of Physics 🌐 English ⚖ 885 KB

Effects of gas flow rate on the etch cha

✍ Bong-Soo Kwon, Hea-Lim Lee, Nae-Eung Lee, Chang-Young Kim, Chi Kyu Choi 📂 Article 📅 2013 🏛 The Korean Physical Society 🌐 English ⚖ 346 KB