Measurements of the electron energy distribution function in an Ar/CF[sub 4] inductively coupled plasma

✍ Scribed by Bowden, M. D.; Tabata, R.; Suanpoot, P.; Uchino, K.; Muraoka, K.; Noguchi, M.

• Book ID: 120513268
• Publisher: American Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 299 KB
• Volume: 90
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1398775