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Fourier-transform infrared and optical emission spectroscopy of CF[sub 4]/O[sub 2]/Ar mixtures in an inductively coupled plasma
✍ Scribed by Cruden, Brett A.; Rao, M. V. V. S.; Sharma, Surendra P.; Meyyappan, M.
- Book ID
- 120401230
- Publisher
- American Institute of Physics
- Year
- 2003
- Tongue
- English
- Weight
- 411 KB
- Volume
- 93
- Category
- Article
- ISSN
- 0021-8979
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