Neutral gas temperature estimates in an inductively coupled CF[sub 4] plasma by fitting diatomic emission spectra

✍ Scribed by Cruden, Brett A.; Rao, M. V. V. S.; Sharma, Surendra P.; Meyyappan, M.

• Book ID: 121486270
• Publisher: American Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 399 KB
• Volume: 91
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1474614