✦ LIBER ✦

Measurement of non-Maxwellian electron energy distributions in an inductively coupled plasma

✍ Scribed by Hori, T.; Bowden, M. D.; Uchino, K.; Muraoka, K.

Book ID: 120186383
Publisher: American Institute of Physics
Year: 1996
Tongue: English
Weight: 274 KB
Volume: 69
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.117188

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A study of electron energy distributions

A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering

✍ Hori, T.; Kogano, M.; Bowden, M. D.; Uchino, K.; Muraoka, K. 📂 Article 📅 1998 🏛 American Institute of Physics 🌐 English ⚖ 386 KB

Electron energy distribution function me

Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma

✍ Godyak, V A; Piejak, R B; Alexandrovich, B M 📂 Article 📅 2002 🏛 Institute of Physics 🌐 English ⚖ 772 KB

Measurements of the electron energy dist

Measurements of the electron energy distribution function in molecular gases in an inductively coupled plasma

✍ Singh, Harmeet; Graves, David B. 📂 Article 📅 2000 🏛 American Institute of Physics 🌐 English ⚖ 400 KB

Spectroscopic diagnostics of glow discha

Spectroscopic diagnostics of glow discharge plasmas with non-Maxwellian electron energy distributions

✍ Behringer, K; Fantz, U 📂 Article 📅 1994 🏛 Institute of Physics 🌐 English ⚖ 647 KB

Measurements of the electron energy dist

Measurements of the electron energy distribution function in an Ar/CF[sub 4] inductively coupled plasma

✍ Bowden, M. D.; Tabata, R.; Suanpoot, P.; Uchino, K.; Muraoka, K.; Noguchi, M. 📂 Article 📅 2001 🏛 American Institute of Physics 🌐 English ⚖ 299 KB

Electron energy control in an inductivel

Electron energy control in an inductively coupled plasma at low pressures

✍ Shindo, Haruo; Urayama, Takuya; Fujii, Takashi; Horiike, Yasuhiro; Fujii, Syuits 📂 Article 📅 2000 🏛 American Institute of Physics 🌐 English ⚖ 292 KB