Measurements of the electron energy distribution function in molecular gases in an inductively coupled plasma

✍ Scribed by Singh, Harmeet; Graves, David B.

• Book ID: 125899195
• Publisher: American Institute of Physics
• Year: 2000
• Tongue: English
• Weight: 400 KB
• Volume: 87
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.373036