✦ LIBER ✦
Langmuir probe measurements in an inductively coupled plasma: Electron energy distribution functions in polymerizing fluorocarbon gases used for selective etching of SiO[sub 2]
✍ Scribed by Gaboriau, Freddy; Peignon, Marie-Claude; Cartry, Gilles; Rolland, Laetitia; Eon, David; Cardinaud, Christophe; Turban, Guy
- Book ID
- 125516714
- Publisher
- AVS (American Vacuum Society)
- Year
- 2002
- Tongue
- English
- Weight
- 380 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0734-2101
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