Plasma characteristics of an Ar/CF4/N2 discharge in an asymmetric dual frequency reactor: numerical investigation by a PIC/MC model

✍ Scribed by Georgieva, V; Bogaerts, A

• Book ID: 111972574
• Publisher: Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 885 KB
• Volume: 15
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/15/3/010