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Numerical study of Ar/CF[sub 4]/N[sub 2] discharges in single- and dual-frequency capacitively coupled plasma reactors

✍ Scribed by Georgieva, V.; Bogaerts, A.; Gijbels, R.

Book ID: 121483528
Publisher: American Institute of Physics
Year: 2003
Tongue: English
Weight: 734 KB
Volume: 94
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1603348

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