✦ LIBER ✦

Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring

✍ Scribed by Lafleur, T.; Delattre, P. A.; Johnson, E. V.; Booth, J. P.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Control of the ion flux and ion energy i

✍ Lafleur, T; Booth, J P 📂 Article 📅 2012 🏛 Institute of Physics 🌐 English ⚖ 601 KB

Comparison of measurements and particle-

✍ O’Connell, D.; Zorat, R.; Ellingboe, A. R.; Turner, M. M. 📂 Article 📅 2007 🏛 American Institute of Physics 🌐 English ⚖ 700 KB