✦ LIBER ✦

Control of the ion flux and ion energy in CCP discharges using non-sinusoidal voltage waveforms

✍ Scribed by Lafleur, T; Booth, J P

Book ID: 120310512
Publisher: Institute of Physics
Year: 2012
Tongue: English
Weight: 601 KB
Volume: 45
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/45/39/395203

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Separate control of the ion flux and ion

Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring

✍ Lafleur, T.; Delattre, P. A.; Johnson, E. V.; Booth, J. P. 📂 Article 📅 2012 🏛 American Institute of Physics 🌐 English ⚖ 565 KB

Use of ion-energy distributions for the

Use of ion-energy distributions for the identification of species and production mechanisms in low-pressure DC discharges

✍ Víctor J. Herrero; Andrey M. Islyaikin; Isabel Tanarro 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 165 KB

## Use of ion-energy distributions for the identification of species and production mechanisms in low-pressure DC discharges Mass spectrometry finds widespread application in the analysis of ion distributions in different kinds of plasmas. 1 In DC discharges, the ions reaching the cathode are usua

Time resolved and time integrated measur

Time resolved and time integrated measurement of deuterium ion fluxes and energies in the dite tokamak, using carbon probes

✍ S.K. Erents; E.S. Hotston; G.M. McCracken; C.J. Sofield; J. Shea 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 569 KB

Energy and angle distribution of ions in

Energy and angle distribution of ions in various regions of the cathode in a high voltage Penning discharge: O K Kurbatov, Zh Tekh Fiz, 36(9), Sept 1966, 1665–1668 (in Russian)

📂 Article 📅 1967 🏛 Elsevier Science 🌐 English ⚖ 171 KB

[IEEE IEEE Conference Record - Abstracts

[IEEE IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference - Monterey, CA, USA (20-24 June 1999)] IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297) - Control of ion energy and angular distributions using voltage waveform

✍ Rauf, S. 📂 Article 📅 1999 🏛 IEEE ⚖ 70 KB

Studies in ion solvation in non-aqueous

Studies in ion solvation in non-aqueous solvents and their aqueous mixtures. Part 15.—Free energies of transfer of cadmium chloride from water to 10–40%(w/w) methanol-water mixtures at 25°C; dissociation of CdCl+; use of dilute cadmium amalgam electrodes. The group II cations.

✍ Feakins, D.; Willmott, Alan S.; Willmott, Ann R. 📂 Article 📅 1973 🏛 The Royal Society of Chemistry ⚖ 772 KB