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Theoretical and experimental study of ion flux formation in an asymmetric radio-frequency capacitive discharge

✍ Scribed by Schweigert, I V; Ariskin, D A; Chernoiziumskaya, T V; Smirnov, A S

Book ID: 120333206
Publisher: Institute of Physics
Year: 2011
Tongue: English
Weight: 529 KB
Volume: 20
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/20/1/015011

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