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Modulation of electron energy distributions and discharge parameters in a dual frequency ICP discharge

✍ Scribed by Mishra, Anurag; Kim, Tae Hyung; Kim, Kyong Nam; Yeom, Geun Young


Book ID
121493150
Publisher
Institute of Physics
Year
2013
Tongue
English
Weight
485 KB
Volume
22
Category
Article
ISSN
0963-0252

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