✦ LIBER ✦
Synergetic effects in a discharge produced by a dual frequency–dual antenna large-area ICP source
✍ Scribed by Mishra, Anurag; Kim, Kyong Nam; Kim, Tae Hyung; Yeom, Geun Young
- Book ID
- 121447356
- Publisher
- Institute of Physics
- Year
- 2012
- Tongue
- English
- Weight
- 424 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0963-0252
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