Influence of dual-frequency source powers on ion density and electron temperature in capacitively-coupled argon plasma

✍ Scribed by Xiang-Zhan Jiang; Yong-Xin Liu; Wen-Qi Lu; Zhen-Hua Bi; Fei Gao; You-Nian Wang

• Book ID: 113940805
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 366 KB
• Volume: 86
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/j.vacuum.2011.04.026