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New results in d.c. reactive magnetron deposition of TiNx films

✍ Scribed by J. Musil; S. Kadlec; J. Vyskočil; V. Valvoda

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 740 KB
Volume: 167
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(88)90487-7

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