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Deposition of AlOxFy films using d.c. reactive sputtering

✍ Scribed by A. Belkind; B. Kopp; R. Sherman

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 518 KB
Volume: 199
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(91)90010-u

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