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Deposition of SiNx by reactive d.c. magnetron sputtering

✍ Scribed by PeterJ. Clarke

Publisher: Elsevier Science
Year: 1977
Tongue: English
Weight: 35 KB
Volume: 45
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(77)90219-x

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