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Deposition of ZrC thin films and plasma-polymerized hydrocarbon films in the reactive magnetron sputtering process

✍ Scribed by Masaaki Yoshitake; Toshikazu Nosaka; Akio Okamoto; Soichi Ogawa; Kazuhiro Nishikawa


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
609 KB
Volume
221
Category
Article
ISSN
0040-6090

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