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Deposition of organic-inorganic composite thin films by Li3PO4 sputtering and C2H4 plasma polymerization

✍ Scribed by B.S. Kwak; R.A. Zuhr; J.B. Bates

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 815 KB
Volume: 269
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)06654-3

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