Laser-stimulated growth of the εTi2N phase in TiN films during d.c. reactive magnetron sputter deposition

✍ Scribed by V. Poulek; J. Musil; V. Valvoda; R. Kuzel Jr.

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 355 KB
• Volume: 196
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(91)90370-d