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Partially reactive d.c. magnetron sputtering — a key to new understanding of reactive plasma sputter deposition?

✍ Scribed by Gerhard Sobe

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
412 KB
Volume
74-75
Category
Article
ISSN
0257-8972

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Thin Ðlms of FeTaN have been investigated as potential head materials for several years. However, little information related to its chemical characteristics can be found in the literature, therefore polycrystalline and epitaxial FeTaN Ðlms were synthesized by d.c. reactive magnetron sputtering. Foll