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Determination of the chemical and physical properties of hydrogenated carbon deposits produced by d.c. magnetron reactive sputtering

✍ Scribed by Pierre Vanden Brande; Stéphane Lucas; René Winand; Alain Weymeersch; Lucien Renard

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 564 KB
Volume: 68-69
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(94)90233-x

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