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Neo-pentoxide Precursors for MOCVD Thin Films of TiO2 and ZrO2

✍ Scribed by J. J. Gallegos III; T. L. Ward; T. J. Boyle; M. A. Rodriguez; L. P. Francisco

Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 598 KB
Volume: 6
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(200002)6:1<21::aid-cvde21>3.0.co;2-c

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