MOCVD Growth and Characterization of ZrO2 Thin Films Obtained from Unusual Organo-Zirconium Precursors

✍ Scribed by Simone Codato; Giovanni Carta; Gilberto Rossetto; Gian Antonio Rizzi; Pierino Zanella; Paolo Scardi; Matteo Leoni

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 461 KB
• Volume: 5
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/(sici)1521-3862(199908)5:4<159::aid-cvde159>3.0.co;2-e