MOCVD of ZrO2 and HfO2 Thin Films from Modified Monomeric Precursors

✍ Scribed by U. Patil; R. Thomas; A. Milanov; R. Bhakta; P. Ehrhart; R. Waser; R. Becker; H.-W. Becker; M. Winter; K. Merz; R. A. Fischer; A. Devi

• Publisher: John Wiley and Sons
• Year: 2006
• Tongue: English
• Weight: 687 KB
• Volume: 12
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200506394