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Nanostructure of near-surface Si layers formed by implantation and pulsed laser annealing

✍ Scribed by D. Klinger; J. Auleytner; D. Żymierska; L. Nowicki

Book ID: 117622151
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 172 KB
Volume: 362
Category: Article
ISSN: 0925-8388
DOI: 10.1016/s0925-8388(03)00599-1

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