Strained SiGeSn formed by Sn implant into SiGe and pulsed laser annealing

✍ Scribed by Wang, Grace Huiqi; Toh, Eng-Huat; Wang, Xincai; Tripathy, Sudhiranjan; Osipowicz, Thomas; Chan, Taw Kuei; Hoe, Keat-Mun; Balakumar, Subramaniam; Lo, Guo-Qiang; Samudra, Ganesh; Yeo, Yee-Chia

• Book ID: 121263856
• Publisher: American Institute of Physics
• Year: 2007
• Tongue: English
• Weight: 686 KB
• Volume: 91
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2803853