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Electrical and structural properties of poly-SiGe film formed by pulsed-laser annealing

✍ Scribed by Watakabe, H.

Book ID: 127245562
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 463 KB
Volume: 95
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1707216

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