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Structural and electrical properties of poly-SiGe thin films prepared by reactive thermal CVD

✍ Scribed by K. Shiota; D. Inoue; K. Minami; J. Hanna

Book ID
117149056
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
451 KB
Volume
227-230
Category
Article
ISSN
0022-3093

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