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Structural and electrical properties of Ta2O5thin films prepared by photo-induced CVD

✍ Scribed by JUN LIU; AIXIANG WEI; XIANGHUI ZHAO; HAIYAN ZHANG

Publisher: Springer-Verlag
Year: 2011
Tongue: English
Weight: 281 KB
Volume: 34
Category: Article
ISSN: 0250-4707
DOI: 10.1007/s12034-011-0106-4

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