Characterization of Si1−x−yGexCy films grown by C+ implantation and subsequent pulsed laser annealing

✍ Scribed by Jian-Shing Luo; Wen-Tai Lin; C.Y Chang; P.S Shih; F.M Pan; T.C Chang

• Book ID: 114194661
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 318 KB
• Volume: 60
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/s0254-0584(99)00073-5