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Growth of pseudomorphic Si1−yCy and Si1−x−yGexCy alloy layers on Si by ion implantation and pulsed excimer laser induced epitaxy

✍ Scribed by Eric Fogarassy; Adriana Grob; Jean-Jacques Grob; Dominique Muller; Bernard Prévot; Salomé de Unamuno; Pierre Boher; Marc Stehle


Book ID
114194341
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
639 KB
Volume
54
Category
Article
ISSN
0254-0584

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