𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Nanostructure characterization of high k materials by spectroscopic ellipsometry

✍ Scribed by L. Pereira; H. Águas; E. Fortunato; R. Martins

Book ID
108060034
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
511 KB
Volume
253
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Spectroscopic ellipsometry characterizat
Spectroscopic ellipsometry characterization of silicon-on-insulator materials
✍ J. Vanhellemont; H.E. Maes 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 570 KB

The wide applicability of spectroscopic ellipsometry (S/z) to characterize non-destructively silicon-on-insulator materials is illustrated with a number of case studies. SE allows the determination of not only the optical properties of single layers as a fimction of the wavelength but also their thi

Low-k dielectrics: a non-destructive cha
Low-k dielectrics: a non-destructive characterization by infrared spectroscopic ellipsometry
✍ P. Boher; C. Defranoux; M. Bucchia; C. Guillotin 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 773 KB

An infrared spectroscopic ellipsometer devoted to the characterization of silicon microelectronics has recently been developed at SOPRA. Its main feature is the ability to measure on a small spot (803200 mm) with a high signal / noise ratio. An original patented optical design suppresses back face r